ASAP-1® IN SITU
5-Axis CNC Mill for Selected Area Sample Preparation
Building on more than 25 years of product development and customer input, ASAP-1® In Situ is our flagship bench-top milling, decapsulation, and sample prep system.
ASAP-1® In Situ includes a new OS, driven by a large touchscreen and/or mouse & keyboard — or even programmed remotely — that allows for control of all
process parameters. Stage illumination has been further improved, with the addition of NIR LEDs. Three standard UHD cameras (target, front & side process) ensure the process can be monitored live.
An ‘open’ physical design allows ASAP-1® In Situ to successfully process the widest size range of IC package — from the tiniest surface mount components, right up to the largest aerospace modules/motherboards and selected areas of a 300mm wafer.
Along with legacy thermal, end-pointing and curvature compensation options, ASAP-1® In Situ can be fitted with a through-silicon RST Measurement System — allowing in situ mapping of remaining silicon across the die without sample transfer — thus avoiding translation errors.
- IN SITU RST Upgrade – No tilt/curve translation errors – single footprint solution
- Adaptive 3D Mesh & Curve Mapping
- Import Overlays – use X-RAY, C-SAM images to improve targeting
- Two RST Versions available- NIR (≥10 microns) and VIS (≥ 10 nm) for ultra-thinning
- High-Def Digital Cameras — all native 4K (UHD)
- Option for (up to) 32” Vision Monitor
- Program by Touch, Mouse/Keyboard or REMOTELY
Please see below for more details
Please Contact us for a copy of the ASAP-1® IN SITU Datasheet
| Z-Vertical Direction Precision | 0.04 microns (40 nanometers) minimum step-size |
| Table Precision (X & Y Travel) | 0.2 microns (200 nanometers) minimum step-size |
| Table Travel Amplitude | 100mm x 100mm (max.) |
| Polishing Method | Patented ASAP-1® Float-down head, with Z-lock, enhanced with electronic sensors and tool patterns (ASAP-1® Classic, ASAP-1® X, ASAP-1® Swap, Serpentine, User-defined X-Y, Spiral, Frame, and Relief) |
| Sample Tilt Control | Automated 2-circle stage tilt control (+/- 5 degrees) |
| Force Control | 1000 grams (max) with 1gram precision. Overall accuracy +/- 10 grams |
| Programming Input Method | Touchscreen, joystick and 3 physical rotary encoders. Optional wireless keyboard and mouse. File load/save to flash drive. Remote programming |
| Core Software Features | Drop-down menu interface for File handling, Cam Select, zoom, and image enhancement, Overlays, Tool Diameter, Pattern Select, Force Control, timers, Illumination, Set-points, Touch-off. Additional purchased options unlock menus for RST, 3D controls, thermal, end-point |
| Process Cameras | Two 4K UHD Cameras provide real-time video at 45 degrees to tool/surface interface at front and side |
| Target Camera | 4K UHD Camera provides top-down video for positional targeting |
| Power Requirements | Universal: 100-120VAC; 200-240VAC (Single Phase). Power Consumption: 300 Watts Maximum in use |
| Footprint | 19 inches (480mm) Width x 27.5 inches (698 mm) Depth x 27 Inches (685mm) Height |
| Weight | 200lbs (91 kg) |
Features and Specifications subject to change without notice
Please Contact us for a copy of the ASAP-1® IN SITU Datasheet
| Part # | Item | Description |
| 6760.5 | ASAP-1® IN SITU (2024 Model) | DIGITAL Selected Area Preparation System, (100-240V, 50/60Hz). Includes: tool spindle drive with sub-micron Z-resolution, +5/-5 degree automated X-Y tilt-table, integrated real-time machine vision, min 10-inch touchscreen lcd monitor, set of 2mm and 3mm tools, 6389.1 Force Feedback module. Three 4K UHD Cameras (Target & Process Front and Side) |
| 6394.3 | 3D Module – Curvature & Mesh | System software upgrade to add processing and compensation for sample surface curvature with adaptive mesh overlay |
| 6686.1 | Heat & Cool Thermal Relaxation Stage | Hardware and Software Upgrade to add thermal relaxation capability. Touch-Panel screen controls. Peltier-based heating plate, Chiller unit. Includes cables, and two mounting plates. Hot Plate Mode |
| 6675.1 | Machine Vision Monitor | 24-inch (min) monitor machine vision upgrade for improved In Situ view of polishing tip/sample surface interface, includes stand (VESA mount) |
| 6677.1 | Fluid Control System (FCS) | Auto dispense and collect system for polishing fluids and abrasives. Three input lines |
| 6682.1 | Thermal Acclimation Plate | Adds ability to allow inlet fluid from FCS to reach required process temperature |
| Characterization Modules | ||
| UT-F3 | RST (Through-Silicon) Measurement System | Non-contact measurement (1280-1340nm) of silicon and other semiconductors. Includes: Thickness-Solving Software. 4K Video camera (microscope); Si thickness standard. Note: Customer supplies own PC/tablet – Windows 10 required. Measures from full wafer thickness down to approx. 8 microns RST |
| UT-VIS | VIS Extension for thin films | 2nd “VIS” Spectrometer addition to the UT-F3 system to allow for ultra thinning applications. Adds film measurement down to approx. 8nm RST |
| 6368.1 | Capacitive/Resistive End-Point Module | Hardware and Software Upgrade to add end-pointing for enhancement of decapsulation performance |
** Features and Specifications subject to change without notice **
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