NANORO M
For semiconductor R&D and advanced materials imaging
Powerful optical Nanoscope with super-resolution capability and ease of use for anyone familiar with conventional white-light microscopy.
- LIG NANOWISE patented lenses allow the NANORO M to image beyond the diffraction limit whilst maintaining colour information. Dry and Immersion objective lenses available.
- Rapid sample scanning using LIG NANOWISE software suite and nanometric stage allows you to rapidly image large areas of a sample significantly faster than standard light microscopes and at multiple resolutions.
- The NANORO M supports a range of objective lenses, from low resolution (10x) to super resolution (SMAL). Using optional SMAL objectives, the NANORO M can resolve lateral features below 100 nm depending on the sample, without the need for prohibitive environmental conditions. The Nanoro M can be placed on a standard optical table requiring no clean room, vacuum, etc.
- Unlike conventional super-resolution techniques, the NANORO M is None-Destructive allowing the user to image samples multiple times without compromising its integrity.
Powerful Optiocal Nanoscope for Semiconductor R&D and advanced materials imaging, including..
- Sub 100 nm Optical Resolution
- Wide Area Scanning & Stitching
- Wavelength Selectivity
- The only microscope that can fully utilise power of LIG NANOWISE SMAL lenses
- Powered by White Light and Optics
Features and Specifications subject to change without notice
| Camera Sensor |
Type: Full colour Bayer pattern CMOS |
| Illumination | Variable output LED. Typical Lifetime: 100 000 h Power consumption: 3.2 W Optical Power:> 800 mW Max irradiance at 200mm: 24.8 µW / mm2 Colour: Cold White (6500 K) Illumination range: 400 nm – 700 nm Peak Spectral flux emission:440 nm Peak Spectral flux @ ~ 440nm22 mW / nm |
| Iris control for SMAL | Software controlled XY position XY Control:100 µm increment Iris Control:0.145° increment |
| Turret | Manual Support: 4 lenses Connection: M25 |
| Monitor |
Interface: HDMI |
| Software | Separated browser, scan manager and explore modes for ease of use Digital Zoom in live explore and browser modes Auto Focus configured for x10, x40, x100 and SMAL lenses Measuring / dimensioning tools Distance calibration versus encoder 4k monitor support for super-resolution analysis Snapshot and Area Scan modes Image meta-data support (footer legend display) User-sizeable region of interest for stitching User configurable dwell time between stitched images User controlled wavelength selectivity and iris setting (size and position). Integrated software joystick Support for Nanoro 3-axis Hall effect device Bespoke lens selection and entry Image stitching on all lenses, supplied or otherwise Configurable image export (e.g. to “Image J” or “Gwyddion”) Maximum stitch area: 64 mm2 (limited for files up to 600 Mbyte) Maximum accessible scan area:1600 mm2 Maximum stitch image size: 28,000 x 28,000 pixels Maximum stitch image size: 784 MP |
| Lens Support | Infinity Corrected Thread: M25 Standard M25 threading with 10x, 40x, 100x, and SMAL Other lenses available on request, including various Oil, Water and Air lenses |
| Z Stage |
Design: Crossed-roller bearings
Positioning: True, anti-backlash Travel Range: 60 mm Resolution:100 nm Minimum movement: 100 nm |
| XY Scanning Stage – 50 mm |
Anti-creep crossed-roller bearings
Positioning: True, zero backlash Encoder: Linear on sample carriage Travel range: 50 mm Max Velocity: 500 mm/s Resolution / minimum step size: 5 nm In-position stability: < 1nm Bi-directional repeatability: +/- 75 nm Accuracy: +/- 250 nm Load capacity: 3 Kg MTBF*: 20,000 h |
| Human Interface |
Joystick: (option) 3-axis Hall effect
Mouse: 2 button and wheel Keyboard: Standard alphanumeric |
| Size and Weight (approx) |
Nanoro-M Microscope Weight: 24 Kg
Nanoro-M Microscope Size: 30 x 40 x 60 cm Nanoro-M Controller Weight: 19 Kg Nanoro-M Controller Size: 27 x 60 x 65 cm |
| Power |
Voltage: 230 Vac / 110 Vac **
Current:0.4 A / 0.6 A
Max power consumption:100 W **
** Requires selection via controller internal switch**
|
Features and Specifications subject to change without notice
Wide Area Scanning & Stitching
With a nano-precision scanning stage and custom stitching algorithm, the NANORO M can rapidly image and stitch together large area scans at different resolutions, from 10x magnification to super-resolution.
*scan is for illustrative purposes only, speed may vary
Sub 100 nm Optical Resolution
The fine lines visible with SMAL in the image to the right have been independently measured by SEM as 66nm wide
Wavelength Selectivity
This tool can be applied to ensure that the images are in-focus for the wavelengths of interest, or alternatively, where the sample has some degree of transparency versus wavelength, that the specific region of interest is imaged at the sharpest, highest resolution.
Objectively Powerful
The only microscope that can fully utilise power of SMAL, the Nanoro M can take super-resolution scans in high contrast and perform side illumination microscopy to give more topographical data than with a standard white light microscopy.
Powered by White Light and Optics
Because it is fully optical the NANORO M has all the benefits of white light microscopy. It is easy to use, can utilise various objective lenses, is non-destructive and requires minimal sample preparation.
